| 摘要 |
PURPOSE:To obtain a thin film having a uniform composition distribution by rolling up thin plates in a piled state so that the ratio in thickness between the thin plates is made equal to the ratio in the composition of a thin film to be formed and by using a cross-section of the resulting roll for a target as a face to be sputtered. CONSTITUTION:Thin plates are rolled up in a piled state so that the ratio in thickness between the thin plates is made equal to the ratio in the composition of a thin film to be formed. The resulting roll 1 is adhered to a copper backing plate 3 with an adhesive layer 2 of In, and the top of the roll 1 is polished to form a target. A thin film having a uniform composition distribution is obtd. by using the target. |
