| 摘要 |
PURPOSE:To shorten the transferring time of a plurality of wafers by communicating through guide slots between wafer containing slots of different pitches of carriers, and mechanically converting the attitude of a placing base. CONSTITUTION:A base 1 is turned clockwise at 90 deg. at a shaft 2 as a center, and held horizontally. A vacant carrier 3 and a carrier 7 containing a wafer 11 are set on the base 1, the containing slot 4 of the carrier 3 is brought in coincidence with the slot 6 of a guide 5, the slot 8 of the carrier 7 is brought in coincidence with the slot 10 of a guide 9, and mounted by a plate 12. When the base is turned counterclockwise at 90 deg., the wafer 11 is led to the slot 4 of the carrier 3 by its own weight. The base 1 is again reversed at 90 deg. to displace the groove 10 with respect to the groove 6 at the pitch, the new carrier 7 is mounted on the guide 9, and turned at 90 deg.. Then, the wafer is fed to another slot 4. Similarly, wafers are transferred to the slots 4 of the all carriers 3. With this configuration, a plurality of wafers can be simultaneously transferred only by altering the attitude of the base between the carriers of different pitches.
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