| 摘要 |
PURPOSE:To set an ion beam irradiation detector at the most suitable position corresponding to each observation point, by installing movable the detector to detect the secondary electron radiated from a subject observed owing to the ion beam irradiation, at a movable system. CONSTITUTION:An ion beam 1 is radiated over a sample 12, and its secondary electron is detected by a detector 5. In this case, X table 28 is furnished movable in the horizontal direction, and Z table 27 movable in the vertical direction, supported on a side table 13a which is unitary to a table 13. At the top end of the Z table, the detecting portion consisting of the secondary electron intake electrode 18, a scintillator 19, and a light guide 20 is fixed, and connected to a photoelectron amplifying tube 23 which is fixed at a vacuum flange 26 through a light fiber 21, so as to form an ion beam irradiation system. Therefore, the position of the detector 5 can be adjusted constantly at the most suitable point, allowing an accurate sample observation. |
