Integral fluid filter and capillary.

摘要

A comb filter (16) including a first plurality of generally parallel grooves (24) and a capillary (18) including a second groove (30) connected to the first plurality of grooves are integrally formed in a substrate (10) such as by selective etching a surface of a semiconductor substrate. A cover (14) is affixed to the surface (12) and covers the etched grooves (24, 28, 30). An input line (33) is connected to the filter (16) and an output line (35) is connected to the capillary (18). A second comb filter (20) can be included in the output line.