Guide rail apparatus for positioning flat objects for microscopic examination

摘要

A work station for photomask inspection includes a microscope and a movable stage positioned below the objective of the microscope. A rectangular frame of the stage surrounds a viewable area of the stage. Rail means are bolted onto the frame at spaced apart positions corresponding to the width of the photomask that is to be inspected so as to position the photomask therebetween. The rails have end stops that are positionable according to the length of the photomask for positioning the end edges of the photomask therebetween.