发明名称 Substrate and substrate holder
摘要 A substrate having two parallel planar faces and an edge with a groove is simultaneously coated on both sides in a vacuum chamber. The substrate is raised, lowered and held on edge while the parallel faces are vertically disposed by a blade inserted into the groove so that while the substrate is coated an unobstructed path exists for the coating material to the faces.
申请公布号 US4558388(A) 申请公布日期 1985.12.10
申请号 US19830548124 申请日期 1983.11.02
申请人 VARIAN ASSOCIATES, INC. 发明人 GRAVES, JR., WALTER E.
分类号 G11B23/00;C23C14/50;G11B5/82;G11B5/84;G11B5/85;G11B5/851;(IPC1-7):G11B5/82;B05D3/00;B05D5/12 主分类号 G11B23/00
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