| 摘要 |
PURPOSE:To stabilize a performance characteristic by providing a liquid ion source containing a needle-shaped electrode with a means for giving oscillation to a material to be ionized in order to maintain the electrode tip always in wet condition with a molten ionized material. CONSTITUTION:The storage part of a material 2 to be ionized, the heater part 3' made of carbon made to act as a heater, a carbon-made and needle-shaped electrode 1 inserted into a through-hole in its center and a drawer type electrode 4 form a liquid ion source while incorporating an oscillating means consisting of two sheets of electrode plates 7 and a piezo-electric body 6 made of barium titanate into a supporter 11 of the electrode 1 for being given alternating voltage of several ten kHz. Accordingly, the tip of the electrode 1 can be always maintained in uniformly wet condition with the material 2 to be ionized by giving oscillation to the material 2 to be ionized through the electrode 1 for stabilizing emission of an ion beam. |
