METHOD AND DEVICE FOR COATING BY GLOW DISCHARGE

摘要

PURPOSE:To form a uniform coating layer having an excellent adhesive strength on the surface of the member to be treated by heating and holding the wall of pressure reducing container adjoining a compound gaseous substance and a composing component inside the container and by performing a glow discharge with the introduction of a gaseous substance after pressure reduction. CONSTITUTION:A heating element 17 to heat a container wall and a composing component of the inside of the container is interposed inside a sealed container 1. The heating element 17 is connected to a control board 18 and the container wall, etc. are heated at optional temp. The pressure of the inside of the container 1 is reduced and the metal or half-metal compound of a metal compound source 13 is changed into a gaseous substance by a carrier gas 12 and introduced into the container 1 by mixing with a reactive gas 9 and a coating layer is formed on the surface of the member 2 to be treated by a glow discharge. According to this method a uniform coating treatment having an excellent adhesive strength can be quickly performed.