| 摘要 |
PURPOSE:To detect a heat flow with high sensitivity by constituting the titled heat flow sensor, of a plate-shaped insulating substrate, a piezoelectric film formed on each of two surfaces which are parallel to each other, of said plate- shaped insulating substrate, and a pair of interdigital electrode films. CONSTITUTION:A heat flow sensor is constituted of a plate-shaped insulating substrate 5, a piezoelectric films 6 and 8 formed on each of two surfaces which are parallel to each other, of said plate-shaped insulating substrate 5, and a pair of cross finger type electrode films 7, 7'. Such a heat flow sensor is placed in front of a radiating surface 4, and when a temperature difference of 1 deg.C is generated between the piezoelectric film 6 and the piezoelectric film 8, a difference of about 10kHz is observed in oscillation frequencies of the first oscillating circuit and the second oscillating circuit. In this way, a heat flow sensor of this invention can detect a temperature difference of the surface and the rear side of a heat resistor with a high sensitivity, therefore, the detecting sensitivity of a heat flow is high. |
