| 摘要 |
PURPOSE:To stabilize the quality in bonding by providing a glass fiber leading a laser beam to the tip of a capillery and also by irradiating the laser beam only on bonding. CONSTITUTION:A ceramic capillery 3' is fixed at the tip of an arm 21 and a glass fiber 22 is fixed at the position irradiating around the tip thereof. The laser beam oscillated from a laser oscillator 23 is passed through the inside of the glass fiber 22. When the tip pressure of the ceramic cavillery 3' becomes more than the prescribed pressure, the switch of the laser oscillator 23 is made to be turned on, and so that laser beam irradiates the capillery 3' only on bonding time and heats momentarily. Due to the capillery 3' being not heated at usual time with this method, there is no annealing of wire and the bonding quality is stabilized. |
