发明名称 |
METHOD OF COATING ADHESIVE ON THE INNER SURFACE OF PERICLE FRAME |
摘要 |
<p>A method for coating an adhesive on an inner surface of a pericle frame is provided to obtain stably a coating layer with high quality by preventing the dispersion of the adhesive. An inner surface is in a horizontal state or an upward state by holding a pericle frame(11). An adhesive diluted by a solvent is dropped from a discharge part(16). The adhesive is applied by moving the discharge part. The amount of adhesive is controlled by a moving speed of the discharge part and a position of the discharge part on the pericle frame. The adhesive is coated in a through-hole formed at the pericle frame. An outer width of a front end of the discharge part is more than 50 percent of an inner width of the pericle frame.</p> |
申请公布号 |
KR20080067564(A) |
申请公布日期 |
2008.07.21 |
申请号 |
KR20070122173 |
申请日期 |
2007.11.28 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
SEKIHARA KAZUTOSHI;HAMADA YUICHI |
分类号 |
H01L21/027;G03D13/08;G03F1/62;G03F7/20;H01L21/02 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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