| 摘要 |
PURPOSE:To form a uniform resinous film simultaneously on the plural surfaces of a plate-shaped substrate by providing a specified radius of gyration with respect to the center of rotation to the plate-shaped substrate, and extending the film forming surface in the direction of the center of the revolving shaft, and rotating the substrate with the center of the revolving shaft as a center. CONSTITUTION:A substrate fixing means 13 consists of rotary tables 6 and 9, a connecting rod 10, a supporting plate 11, a substrate holding member 7, a fixing screw 8, etc. A plate-shaped substrate 4 is fixed to the means 13 so that the substrate may be provided with a specified radius of gyration (l) with respect to the center of rotation P of the means 13 and the resinous film forming surfaces 4a, 4b, 4c, and 4d of the plate- shaped substrate 4 may be extended apart in the direction of the center of the revolving shaft of the means 13. A resin having fluidity is coated on the film forming surface of the plate-shaped substrate, and the means 13 is rotated by a driving means 14a to rotate the plate-shaped substrate along with the means 13 with the center of the revolving shaft as a center. A resinous film is formed on two or more surfaces of the plate-shaped substrate in this way. Consequently, a uniform resinous film can be formed within the surface of the plate-shaped substrate, and simultaneously an almost uniform resinous film can be formed on plural surfaces of the plate-shaped substrate.
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