| 摘要 |
PURPOSE:To measure cathode luminescence without imparing resolution for a broad range, by arranging a plurality of mirrors, which reflect cathode luminescent light emitted from a sample at mutually different angles. CONSTITUTION:Cathode luminescent light emitted from a sample 2 is taken out of a light transmitting window 16 to the outside of a vacuum. When the light is reflected by a first mirror 18a, the light is inputted to a first spectroscope 30a. The light, which undergoes the spectroscopic action, is sequentially detected by a first detector 36a. The signal corresponding to the light is amplified by a first amplifier 38a and sent to a recording and displaying part 40. Meanwhile, a base table 20 is moved by the driving of a motor 28, and a second mirror 18b is inserted in the optical system in place of the first mirror 18a. Therefore, the reflected light from the mirror 18b is inputted to a second spectroscope 30b. The light from the spectroscope 30b is sequentially detected by a second detector 36b. The signal is amplified by a second amplifier 38b and sent to the display part 40. |
