发明名称 |
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE ALIGNING METHOD USING THE SAME |
摘要 |
<p>A substrate transfer apparatus is provided to transfer a substrate in a normal position by installing a substrate align member capable of fixing and aligning a substrate in a uniform position at all times. A robot arm is composed of at least one joint. A substrate support part(120) is connected to an end of the robot arm. A substrate align member(150) is formed at one end of the substrate support part. The substrate align member rotates in the horizontal and vertical directions of the substrate support part. A rotation axis is connected to one end of the substrate align member, and the other end of the substrate align member float along the rotation axis to rotate.</p> |
申请公布号 |
KR20080088932(A) |
申请公布日期 |
2008.10.06 |
申请号 |
KR20070031824 |
申请日期 |
2007.03.30 |
申请人 |
JUSUNG ENGINEERING CO., LTD. |
发明人 |
MIN, CHUL HONG;KIM, JOUNG TAE |
分类号 |
H01L21/677 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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