METHOD AND INSTRUMENT FOR MEASURING CONCENTRATION OF OXIDATIVE GAS

摘要

PURPOSE:To obtain a measuring instrument which makes quickly and easily measurement with good accuracy, permits the easy exchange of parts and is small-sized and simple by measuring the intensity of the light emitted in the stage of brining a reducing gas into contact with a process gas to effect chemical reaction with an oxidative gas. CONSTITUTION:A gaseous mixture is conducted from a pipe 5 to a pipe 1 by the operation of a valve 6. The reducing gas, more preferably gaseous silicon hydride is sealed through an introducing pipe 7 into a reaction vessel 2 by the operation of a valve 8. The gaseous fluorine and gaseous silicon hydride in the gaseous mixture admitted into the vessel 2 by the operation of a valve 10 contact with each other and react instantaneously. The emitted light (chemiluminescence) generated in this stage is detected by a photodiode 3 through a window part 11 provided at the other end facing the gas inflow end of the reaction vessel and is converted to an electric signal which is amplified and is recorded as a light intensity-time curve on a recorder 4. The operation is extremely simple and the result is known in several seconds after the gaseous mixture is subjected to the measurement.