| 摘要 |
PURPOSE:To recognize a pellet in a short time with high recognizing accuracy even when the pellet becomes large by using a plurality of ITV cameras of variable magnifications and simultaneously calculating different magnifications for the same image. CONSTITUTION:ITV cameras 20, 21 have variable magnifications, of the magnification of the degree for taking the entire pellet and of high magnification of sufficiently taking the angle of the pellet. When the camera 20 is, for example, set to high magnification, a full-cut wafer without elongation can be sufficiently observed black in a dicing groove width, after binarized in an image processor 12, calculated by a calculation processor 13, and the position can be corrected by an XY table controller 14. On the other hand, when the entire pellet is taken with low magnification by the camera 21 simultaneously upon positioning, an improper mark can be detected, notch, crack or inclination of the pellet can be detected, and judged for the propriety by the processor 13. Thus, even in the elongating wafer of a full-cut dicing, it can be recognized in high recognizing accuracy.
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