APPARATUS FOR GASIFICATION SUPPLY OF CONDENSIBLE MATERIAL

摘要

PURPOSE:To perform the gasification supply of a condensible material in accurate concn. and flow quantity, by providing a gas pressure stabilizing tank and a control valve between a gas generation tank and a gas flow resistant body and adjusting the control valve corresponding to the pressure difference between both sides of the gas flow resistant body. CONSTITUTION:A condensible material 11 is sealed in a gas generation tank 12 under vacuum and the generated gas is introduced into a pressure stabilizing tank 14 through a control valve 13 and thereafter adjusted to a gas stream having a predetermined flow amount through a gas flow resistant body 15 and fed to be mixed with dilution gas. At this time, pressure difference between both sides of the gas flow resistant body 15 is measured and a signal is sent from a control part 31 so as to make the pressure difference constant to control the control valve 13 and the pressure in the gas pressure stabilizing tank 14 is kept constant. This apparatus is stable to the change in circumferential temp. and can be especially used even at high temp.