| 摘要 |
PURPOSE:To measure the slant angle of each measurement surface accurately even if the measurement surface has more or less ruggedness by measuring the shape of each measurement surface of the objective body by a fringe scanning interference measuring method and obtaining the slant angle of each measurement surface on the basis of the measured shape. CONSTITUTION:The body 0 to be measured is placed on a measurement table 10. The slant angle of one surface A of this body to be measured is measured by interference optical systems 32, 34, and 38 which uses reflected light from a fixed plane mirror 34 as reference light. Then, the measurement table in rotated stepwise and another surface B is set in a measurement state and its slant angle is measured by the interference optical systems. Then, the angle that said two surfaces of the objective body contain is calculated from the slant angles of respective surfaces measured by the interference optical systems and stepwise angles of rotation of the measurement table. |
