| 摘要 |
PURPOSE:To increase the current of an accelerating electrode 2' by using a plural number of slits as ion outlets and using an electrode with one slit as an ion-leading-out lens. CONSTITUTION:An accelerating electrode 2' has two adjacent slits 5' and a lead- out electrode 3' has a single hole. Because of the above structure, it is possible to shorten the distance between the slits 5' and to double the lead-out current. The amount of the current can be increased to three times and four times by providing the electrode 2' with three and four slits respectively. Alternatively, the lead-out beam fluxes can be concentrated on a spot by providing the accelerating electrode 2' with a plural number of slits 5'' protruding toward a plasma 1. |
