| 摘要 |
PURPOSE:To form a transparent electrode low in resistance by coating a transparent electrode forming liquid contg. an organic metallic comp., an organic binder and solvent on a base plate and calcining it in the oxygen-enriched atmosphere for the first half and in the oxygen-deficient atmosphere for the latter half. CONSTITUTION:The transparent electrode forming liquid consisting of about 3- 8wt% unhydrolized organic metallic comp. contg. In and Sn or the like, about 1-25wt% organic binder such as nitrocellulose, solvent such as benzyl alcohol and methyl ethyl ketone and the balance is coated on a base plate with screen printing and a dipping method or the like. Then, the base plate is calcined at the temp. of 400-600 deg.C in the oxygen-enriched atmosphere for the first half and in the oxygen-deficient atmosphere for the latter half. In the first half of the above- mentioned calcination, the atmosphere is air and in the latter half, the atmosphere is preferably regulated to N2:O2=9:1 by mixing air with equivalent nitrogen. Thereby, the transparent electrode which is low in resistance and has uniform film quality and film thickness is obtained. |
