| 摘要 |
PURPOSE:To manufacture a thin film made of porous amorphous metal or its alloy by irradiating high speed charged particles to amorphous quality metal or alloy thin from right angle direction to form many track holes therein, treating the thin film by etching liquid. CONSTITUTION:When Fe-Cr alloy, etc. having a prescribed compsn. changes to crystal, the chemical corrosion property is much higher compared with amorphous. The amorphous metal or alloy thin film 1 is sent continuously by rolls D, D, and high speed charged particles of He<+>, O<+>, H<+>, F<+>, alpha particle, proton or deuteron are irradiated thereto from almost right angle crossing direction by an ion accerelator A. In this way, the unidirectional many track holes 10 are formed with penetrating the film 1. Next, the film 1 is treated by chemical etching liquid of hot brine, etc. to dissolve the circumference 11 of the hole 10 varied to crystal, the holes 10 are adjusted to almost cylindrical or truncated cone shape, and the porous amorphous metal or alloy thin film is obtained.
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