| 摘要 |
The nozzle unit for the supply of the plasma-forming gas has a detachable nozzle and cathode holder with cathode. It has an external covering which is a non-conducting amterial. Pref. the nozzle has a non-conducting material which is a ceramic of a thickness 0.1-1mm. The holder also has a non-conducting layer. The holder itself is pref. made of Cu. |
