| 摘要 |
PURPOSE:To form high hardness films having superior wear and corrosion resistances on the surfaces of high precision machine parts without changing the size and shape of the parts by implanting cationized boron ions into the surfaces of the parts. CONSTITUTION:High hardness boride films having superior wear and corrosion resistances and causing no stripping are formed on the surfaces of various precision machine parts by implanting cationized boron ions into the surfaces of the parts at 70keV acceleration voltage, and 5muA/cm<2> beam current density, and >=1X10<17>ion/cm<2>. Since the boride layers having said characteristics can be formed at a relatively low temp. in a short period of time, the machine parts do not undergo a change in the size and shape due to heating to a high temp., so the boride layers show superior adhesion. |
