| 摘要 |
PURPOSE:To obtain optical parts for transparent laser having small absorptance, high chemical stability, long life and being usable for a large output CO2 laser by forming multilayered film of a dielectric body consisting of a specified compd. on a ZnSe substrate. CONSTITUTION:As2Se3 which is a material having high refractive index and high adhesion is used as a material for the first layer 2 contacting with a ZnSe substrate 1 among several element films constituting dielectric multilayered films such as reflection preventing film, partial reflection film, etc. to be used for the ZnSe substrate 1. PbF2 or PbF2 plus As2Se3 having a low refractive index is used for an intermediate layer 2. A layer of ZnSe or ZnS 4 having high water resistance, oxidation resistance and abrasion resistance, and small absorptance is provided to the outermost side for the purpose of protecting chemically unstable each inner layer. By this constitution, the product is usable also for a large output CO2 laser as large as 10kW output, and a ZnSe window, lens, output coupling mirror, beam splitter, etc. having long life, are realized. |
