| 摘要 |
PURPOSE:To protect a semiconductor pellet from impact upon landing on a base material by a method wherein the collet for the pellet goes down at a high speed in the first half of the distance, from the prescribed height to a prescribed position, and at a lower speed in the second half. CONSTITUTION:The front end of a swing arm 2 is provided with a collet 3 attracting a semiconductor pellet, and the rear end with a contact surface 4. An extension spring 6 is installed spanning a pin 5 on a base 2a and the bent portion 1a of a support rod 1, pulling the collet 3 toward the support rod 1. A contact roller 10 is located to meet a plane 12a of a T-shaped lever 12, one of whose ends is rotatably fixed, provided with another contact roller 11 at its middle. The rotary motion of a cam 14 in contact with the contact roller 11 is converted, with the intermediary of a link rod 13 connecting the reat ends of L- shaped arms 7, 8, into a motion of throwing the swing arm 2 into action. The cam 14 causes the speed of the descending collect 3 to change, from a higher speed in the first half to a lower speed in the second half, during its travel ending upon reaching point A indicated in the figure (a). This technique protects a semiconductor pellet from landing hard on the surface of the installation without giving impact to the pellet.
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