| 摘要 |
PURPOSE:To enable exact printing of each of various works by detecting the range and illuminance of luminous flux of UV rays to be projected on the face to be exposed, calculating and controlling the time length of shutter opening and the rotation speed of a fly eye lens. CONSTITUTION:The light emitted from the opening 3 of a light source provided with an elliptical concave mirror 2 and a mercury arc lamp 1 is reflected with a mirror 4, passed through a shutter 16 controlled with CPU22, and a fly eye lens 5, reflected with a mirror 18 and a collimeter mirror 19 to be converted into the parallel light, and it makes incident on the work 23 provided with a mask 24. On the other hand, the part of the light reflected with the mirror 18 is guided to a photometer 21 to detect the range and the illuminance intensity of the UV rays. CPU22 calculates the time length of shutter opening and the rotation speed of the fly eye lens 5 on the basis of the detection signals and controls them, thus permitting exact printing for each work to be executed. |
