| 摘要 |
PURPOSE:To efficiently prepare the titled thin film, by irradiating the laser light, that is the output of the pulse laser oscillator, upon the specified position of the powder or small block of the hardly workable metal attached onto the substrate, so as to melt this metal. CONSTITUTION:For example, such hardly workable metal as W, Re, etc., is worked into powder or small block, which is then pressed and attached onto the substrate 1. This substrate 1 is placed in an airtight room 5 whose interior is evacuated or is sealed with the inert gas atmosphere, on purpose to prevent the substrate 1 from the oxidation. The high output pulse laser light from such pulse laser oscillator 2 as YAG laser, etc., is irradiated upon the specified position of the hardly workable metal attached on the substrate 1, through the mirror 3, the condenser 4 and the penetrable window 6. By settling the position of irradiation of the pulse laser light upon the powder or small block of metal pressed and attached on the substrate 1, and the depth of melt, at the specified values, the thin film of desired shape of the hardly workable metal is prepared. |
