Modular processing apparatus and modules for use therewith.

摘要

A modular processing apparatus includes a chassis adapted to removably receive a plurality of individual modules, each of which performs a specific process function on a workpiece, such as a silicon wafer. A load module includes a flexible arm adapted to be extended and retracted so as to move the workpiece between at least two locations. The flexible arm is provided with a vacuum tube for applying suction to the workpiece in order to maintain the workpiece on the arm during the extension and retraction of the arm. An elevator module moves a workpiece cassette up and down, the elevator module being constructed with minimal moving parts so as to inhibit contamination of the workpieces in the cassette.