| 摘要 |
PURPOSE:To stably supply sublimable substance gas, by guiding the gas obtained by excessively subliming the sublimable substance to a recrystallization trap set to a specific temp. and recrystallizing the excessive portion in the trap to catch and remove the same. CONSTITUTION:A recrystallization trap 3 adapted to excessive AlCl3 is accurately set to a temp. at which AlCl3 vapor pressure required corresponding to a used purpose is obtained. Because the gas entering this recrystallization trap 3 adapted to excessive AlCl3 has a temp. higher than said set temp., the excessive portion of AlCl3 is brought to an over-saturated state in the recrystallization type 3 and crystallized as a colorless transparent crystal. Therefore, the AlCl3 gas in the output of the recrystallization trap 3 adapted to excessive AlCl3 is accurately set to a value as was expected in its vapor pressure and sent to a high temp. hot line 6. |
