| 摘要 |
PURPOSE:To obtain a magnetic material undergoing little reduction in the saturation magnetic flux density and having very low magnetostriction by adding Au when a thin amorphous Co-Zr alloy film is formed by sputtering. CONSTITUTION:A thin amorphous Co-Zr-Au alloy film consisting of, by atom, 90-97% Co, 4-6% Zr and 0.005-0.03% Au is deposited on a substrate by using an alloy target and a composite target in a high-speed sputtering apparatus. A thin amorphous alloy film for a magnetic head having a high crystallization temp. and very low magnetostriction is obtd. The film undergoes little reduction in the saturation magnetic flux density because of the higher Co content. |
