| 摘要 |
PURPOSE:To obtain a magnetic recording medium having excellent corrosion resistance, etc. by providing a protective layer having a specific atomic ratio of Si:O by plasma polymn. of a gaseous mixture composed of a gaseous silicon monomer contg. Si, C and H or further N and contg. gaseous O2 on a magnetic layer formed on a substrate. CONSTITUTION:The magnetic layer 10 is formed on the substrate 1 consisting of a polyester film, etc. by using a magnetic paint contg. gamma-Fe2O3 powder, Co-contg. gamma-Fe2O3 powder, Fe-Ni powder, etc. or said layer 10 is formed on the substrate by a vapor deposition method, etc. on a magnetic metal (including an alloy). The gaseous mixture which is composed of the gaseous silicon monomer contg. Si, C and H or further N, such as Si(CH3)4 or hexamethyl disilasane and 5-10vol%, by the volume of said gaseous monomer, a carrier gas such as Ar and is incorporated therein with an extremely slight amt. of gaseous O2 is introduced into a plasma polymerizing device 2 and the plasma-polymerized film 11 consisting of the O-contg. silicon org. compd. having <=0.5 atomic ratio of O:Si is formed as the protective layer on the above-mentioned magnetic layer 10 on the substrate film 1 moving along the peripheral side surface of a cylindrical can 4. The magnetic recording medium A having excellent corrosion resistance and durability is thus obtd.
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