| 摘要 |
PURPOSE:To enable optimum measurement corresponding to an article to be measued, by providing an up-and-down freely movable probe needle and the measuring head of an optical displacement detector on a surface to be measured by a position converting apparatus freely movable to a horizontal direction so as to selectively and freely oppose to both of them on said surface to be measured. CONSTITUTION:When a surface to be measured is measured by a probe needle type fine shape measuring intrument, a mount plate 19 is moved to the left from the state shown by the drawing and a probe needle 22 is opposed to the surface to be measured of the article to be measured placed on a measuring stand 28 while position regulating knobs 29, 29b are rotated to align the leading end of the probe needle 22 with the point where measurement must be started. Subsequently, the position of the probe needle 22 and the measuring stand 28 are gradually moved in parallel while the leading end of the probe needle 22 is brought into contact with the surface to be measured to measure the uneveness of the surface to be measured in the moving range. When measurement is performed by an optical displacement detector, the leading end of the probe needle 22 is at first coincided with the point, where measurement must be started, in such a state that the mount stand 19 is moved to the left in the drawing and the probe needle is raised while the mount plate 19 is moved to the righthand end of a substrate 17. A measured head 24 and the measuring stand 28 are relatively moved in parallel while laser beam is irradiated from the measuring head 24 and the measurement of a shape in a definite range is performed. |
