| 摘要 |
A gauge element for and a pressure sensor for sensing phenomena such as pressure and temperature comprising a substantially U-shaped unitary piezoresistive element formed from a silicon crystal. When employed for sensing pressure and temperature, resistor means are provided along with means for coupling the first and second legs of the piezoresistive element in an electrical circuit to provide a temperature independent output indicative of the pressure imparted to one leg of the piezoresistive element, and for coupling the second leg and the resistor means to provide an output independent of the pressure imparted to the first leg and indicative of the environmental temperature. This configuration is particularly suitable for miniaturization and therefore useful for biomedical applications wherein the sensor can be inserted into a body transcutaneously by a catheter.
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