| 摘要 |
PURPOSE:To stably convey an article to a prescribed position at a different level in a short time, by providing a staircase-like conveyance passage, a means for conveying the article pitch by pitch, and a means for conveying the article from the downstream end of the conveyance passage to a destination. CONSTITUTION:An article conveyance passage 10 for conveying an article such as a semiconductor chip is formed as a staircase and provided between a high place A and a low place B. A heater 2 is embedded under the article carrying surface 1 of the conveyance passage 10 so as to control the temperature of the article. The article conveyance passage 10 is used as a fixed beam. Conveyance beams 11, 12 for conveying the article pitch by pitch are provided on both the sides of the conveyance passage 10. Heaters 3, 4 are embedded in the beams 11, 12. Conveyance beam mounting bases 21 and cams 22, 23 for moving the conveyance beams 11, 12 up and down and horizontally back and forth are provided as drive means 20 for the conveyance beams. The conveyance beams 11, 12 are thus caused to perform a box motion to convey the article up or down pitch by pitch and step by step while eliminating a level difference. |
