| 摘要 |
PURPOSE:To enlarge constantly the contacting area of a substrate and a substrate holder and thereby to obtain a device excellent in cooling efficiency, by planting fine wires having elasticity and high thermal conductivity on the surface of the substrate holder contacting with the substrate. CONSTITUTION:A substrate holder 1 is formed of metal, and a circulation channel 3 of cooling water is provided inside the holder. Moreover, fine wires 4 having elasticity and high thermal conductivity are planted on the surface, i.e. the cooling surface, of the holder. The fine wires 4 are constituted by round wires, and a plurality of them are bound into a bundle 5. The substrate 6 is held by the substrate holder 1, while a presser plate 7 presses the substrate 6 from around to make it contact with the substrate holder 1. Pressed by the presser plate 7 from the above, the substrate 6 is made to contact with the substrate holder 1 and then processing of the substrate is started. Although the substrate 6 is heated and tranformed, it is in contact constantly at many points with the substrate holder 1 through the intermediary of the fine wires 4 having elasticity and high thermal conductivity, and thus the heat of the substrate 6 is surely transmitted to the substrate holder 1 through the fine wires 4. |
