| 摘要 |
PURPOSE:To obtain a magnetic recording material which is excellent in both corrosion resistance and magnetic characteristic by forming a thin magnetic film contg. iron nitride expressed by FexN at a specific ratio on a substrate by a diagonal reactive ion plating method, etc. CONSTITUTION:The thin Fe-contg. film 3 contg. >=5% iron nitride expressed by FexN (x is 2-8) and contg. <=50% iron nitride expressed by Fe2-3N is formed on the substrate 2 consisting of a synthetic resin film such as polyimide or polyester or non-magnetic metal or glass, by, for example, an ion plating method consisting in feeding gaseous N2 through an introducing pipe 8 at the flow rate controlled by a valve 8, evaporating the Fe (alloy) 10 in a crucible 11 by an electron beam 16, impressing a voltage to a filament 14 and generating thermion current 18. The film 3 is formed while the angle alpha between the perpendicular on the substrate plane and the Fe vapor flow is maintained at >=20 deg.. The film forming speed is maintained at 0.5-200Angstrom /sec. The magnetic recording medium 7 having high coercive force and sufficient corrosion resistance is thus obtd.
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