| 摘要 |
PURPOSE:To stably perform mass separation for a long period of time by creating a section in which dead space is formed with respect to the ion beam irradiation section of a second aperture and sputtering metal is not deposited, on the surface of an insulating spacer. CONSTITUTION:A step-like configuration is formed on both insulating spacers 3 and 3' and a section in which dead space is formed with respect to the irradiation section of the ion beam 8 of a second apeature 6 and sputtering metal 9 is not deposited is created on their surfaces. As a result, the faulty insulation between electrodes 2 and 2' and the second aperture 6 caused by deposited metal 10 that has caused problems for a long-period use can be prevented. |
