摘要 |
PURPOSE:To improve accuracy, by measuring an excentricity by the maximum variation of an image signal detected, in 2 different positions along the direction of central rotating axis, by a line-sensor available for obtaining the primary original image verticular to the central axis and allowed to be rotated through an angle of 360 deg.. CONSTITUTION:A beam of light is irradiated from a light source 1 to a cylindrical object 3 to be measured arranged on a rotating stage 2 available for rotating through an angle of 180 deg. basing on control signal from an image signal processing circuit 6 and an image issued from a line camera 5 is processed in the position 7' by the circuit 6 and an output signal V1 corresponding to it is stored in a memory area A through an A/D convertor 7. Further, the same signal in the area B as it is rotated through an angle of 360 deg., calculating a distance (a) from the both stored values. Further, by shifting the camera 5 to a position 8, a distance (b) is obtained by the same process. And, excentric angle alpha and excentric distance (l) are calculated by CPU8 through equations I and II. |