| 摘要 |
PURPOSE:To attain the miniaturization and wt. reduction of the titled sensor and to enhance the reliability thereof, by constituting an optical chopper from the first optical slit plate provided to the pyroelectric sensor vibrated in parallel to a light receiving surface by a bimorph displacement element and the second slit plate provided to a package. CONSTITUTION:Bimorph displacement elements 30a, 30b are formed by forming two pairs of slits 121-124 to two mutually opposed surfaces of a ceramic frame body 10 coming to a package main body and attaching supports 32 (321-324) to both ends of bimorph vibrators 31a, 31b while a pyroelectric sensor 60, wherein a slit plate 61 is mounted on the fixing seat 50 integrated with a flexible printed board 40, is mounted to said bimorph displacement elements 30a, 30b. Then, a substrate 40 is inserted between the elements 30a, 30b to be received in the frame body 10 and an optical chopper is constituted of the slits 121-124 and the slit plate 61. |
