MANUFACTURE OF ROTOR FOR TURBO MOLECULAR PUMP

摘要

PURPOSE:To enable assembling and diffusion joining without using assembling tools by forming step parts to one surface on the bore side of rotor rings and forming notches into which the step parts can be fitted to the other surface. CONSTITUTION:The many rotor rings 4 and vane plates 5 are alternately stacked to fit the socket and spigot joint parts consisting of the step parts 4a and notches 4b of the rotor rings 4 to each other. The many rotor fings 4 are exactly positioned and stacked to the plates 5. The assembly is installed in this state in a vacuum hot press and the inside of the press is evacuated to a vacuum; at the same time the assembly is heated to the temp. at which are Ti alloy is diffusively joined. The assembly is then pressurized from upper and lower directions and is thus diffusively joined.