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发明名称
IMPROVED SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPS60234330(A)
申请公布日期
1985.11.21
申请号
JP19850081538
申请日期
1985.04.18
申请人
MONSANTO CO
发明人
HERUNGUUDERU CHIOU;JIERII UOFUOODO MUUDEI
分类号
H01L21/322;H01L29/167
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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