发明名称 HEAT TREATMENT DEVICE
摘要 PURPOSE:To enable to have the gas generated from paste to come in contact with a pellet, a lead frame and the like by a method wherein an air passage is provided opposing to the pellet and, at the same time, an air intake passage is provided around said air passage. CONSTITUTION:When a multiple connected lead frame intermittently stops at the prescribed position, a heat block 13 is moved up by an elevator 14, it comes in contact with the back side of the lead frame, the silver paste 4 coated on a tab is hardened by heat and, at the same time, impure gas 19 is generated. However, when the heat block 13 comes in contact with the lead frame 8, a breathing block 15 lightly presses the surface of the lead frame 8, an air intake passage 17 sucks the air located around a pellet 6, clean dry air is sucked in from an air passage 16, the air lightly flow against the upper surface of the pellet 6 and air curtain is formed. Accordingly, the impure gas 19 does not come in contact with the pellet 6, and as it is sucked together with the dry air located directly above the impure gas through the intermediart of the air intake passage 17, the flowing of the impure gas toward the lead frame 8 can be prevented.
申请公布号 JPS60234333(A) 申请公布日期 1985.11.21
申请号 JP19840089431 申请日期 1984.05.07
申请人 HITACHI SEISAKUSHO KK 发明人 TANIMOTO MICHIO;MIMATA TSUTOMU
分类号 H01L21/52;H01L21/58;(IPC1-7):H01L21/58 主分类号 H01L21/52
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