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发明名称
METHOD FOR MAKING POLYCRYSTALLINE SILICON FILM RESISTORS
摘要
申请公布号
EP0090963(A3)
申请公布日期
1985.11.21
申请号
EP19830102546
申请日期
1983.03.15
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
GLANG, REINHARD;KU, SAN-MEI;SCHMITT, ALFRED
分类号
H01L29/73;H01L21/02;H01L21/265;H01L21/3215;H01L21/331;H01L21/822;H01L21/8222;H01L27/01;H01L27/04;(IPC1-7):H01L21/31
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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