发明名称 |
Catalytic oxidation of solid materials. |
摘要 |
<p>One or more monolayers of cerium arrayed on the surface of a niobium metal acts as a catalyst to oxidation of the niobium at ambient temperature and results in a very thin, very high quality insulating layer which may be configured by patterning of the catalyst. Significant amounts of Nb<Sub>2</Sub>0<Sub>5</Sub> are formed at pressures as low as 6.6x 10<Sup>-6</Sup>Pa, promoted by the</p><p>presence of the cerium. This catalytic activity is related to the trivalent to tetravalent valence change of the cerium during oxidation. The kinestics of Nb<Sub>2</Sub>0<Sub>5</Sub> formation beneath the oxidation cerium shows two stages:
<UnorderedLists id="ula01" listStyle="none"><ListItem>the first stage is fast growth limited by ion diffusion;</ListItem><ListItem>the second stage is slow growth limited by electron tunnelling.</ListItem></UnorderedLists></p><p>Other catalytic rare earths usable instead of cerium are terbium and praseodymium; other substrate materials usable instead of niobium are aluminium, hafnium, silicon and tantalum, or oxidizable alloys thereof.</p> |
申请公布号 |
EP0161619(A2) |
申请公布日期 |
1985.11.21 |
申请号 |
EP19850105549 |
申请日期 |
1985.05.07 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
LATTA, ERNST-EBERHARD;RONAY, MARIA |
分类号 |
C01G33/00;B01J23/00;B01J23/10;C01B13/14;C01B13/32;C01G1/00;C23C8/10;C23C8/12;H01L21/316;H01L39/24 |
主分类号 |
C01G33/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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