发明名称 Catalytic oxidation of solid materials.
摘要 <p>One or more monolayers of cerium arrayed on the surface of a niobium metal acts as a catalyst to oxidation of the niobium at ambient temperature and results in a very thin, very high quality insulating layer which may be configured by patterning of the catalyst. Significant amounts of Nb&lt;Sub&gt;2&lt;/Sub&gt;0&lt;Sub&gt;5&lt;/Sub&gt; are formed at pressures as low as 6.6x 10&lt;Sup&gt;-6&lt;/Sup&gt;Pa, promoted by the</p><p>presence of the cerium. This catalytic activity is related to the trivalent to tetravalent valence change of the cerium during oxidation. The kinestics of Nb&lt;Sub&gt;2&lt;/Sub&gt;0&lt;Sub&gt;5&lt;/Sub&gt; formation beneath the oxidation cerium shows two stages: &lt;UnorderedLists id="ula01" listStyle="none"&gt;&lt;ListItem&gt;the first stage is fast growth limited by ion diffusion;&lt;/ListItem&gt;&lt;ListItem&gt;the second stage is slow growth limited by electron tunnelling.&lt;/ListItem&gt;&lt;/UnorderedLists&gt;</p><p>Other catalytic rare earths usable instead of cerium are terbium and praseodymium; other substrate materials usable instead of niobium are aluminium, hafnium, silicon and tantalum, or oxidizable alloys thereof.</p>
申请公布号 EP0161619(A2) 申请公布日期 1985.11.21
申请号 EP19850105549 申请日期 1985.05.07
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 LATTA, ERNST-EBERHARD;RONAY, MARIA
分类号 C01G33/00;B01J23/00;B01J23/10;C01B13/14;C01B13/32;C01G1/00;C23C8/10;C23C8/12;H01L21/316;H01L39/24 主分类号 C01G33/00
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