| 摘要 |
PURPOSE:To constitute the titled interferometer so that it is not influenced by a slight movement or rotation of a constituting element, by arranging a prescribed optical element as required, setting optical paths and the number of times of reflection of the first and the second polarized lights to the same, and making them interface. CONSTITUTION:The first polarized light from a ight source 10 is reflected by a beam splitter 16, and the second polarized light transmits through the splitter 16 and it is reflected by a platen 19. This reflected light is converted to the first polarized light by a 1/4 wavelength plate 15, reconverted to its original polarized light through the splitter 16, a cube 11, the splitter 16, the platen 19 and the wavelength plate 15, and transmits through the splitter 16. Subsequently, it passes through a mirror 150, a 1/4 wavelength plate 14, a cube 13, etc., and is made incident on a detector 17 through the splitter 16, a cube 12 and the splitter 16. The first polarized light reflected by a sample 18 is also reflected by the same number of times in an optical path by the same optical elements and made incident on the detector 17, and an interference by both the lights is generated. Accordingly, this interferometer is not influenced by a slight movement or rotation of a constituting element by a variation of a peripheral environment, and matching, etc. of the constituting element is executed easily.
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