| 摘要 |
PURPOSE:To unnecessitate the separate production of a piezoelectric element and a micro tube by a method wherein a wear-resistant material is laminated while being ionized on the inner surface of the top end of an ultrathin tube having piezoelectric performance and a very small thickness. CONSTITUTION:The wear-resistant material 4 is laminated by ionization on the inner surface of the top end 32 of the ultrathin tube which is a piezoelectric element 3 and has a much smaller thickness than the outer appearance. The product of this structure is light because the element 3 itself is a very thin tube. Besides, the inner surface is coated with a wear-resistant material; therefore, this product is simple in manufacture and excellent in wear resistance. Further, this manufacturing manner can yield the piezoelectric element and the micro tube without separating the two. |
