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发明名称
CHEMICAL VAPOUR DEPOSITION
摘要
申请公布号
GB8525789(D0)
申请公布日期
1985.11.20
申请号
GB19850025789
申请日期
1985.10.18
申请人
MITEL CORPORATION
发明人
分类号
C23C16/44;C23C16/455;C23C16/46;H01L21/205;H01L21/31;H01L21/314;(IPC1-7):C23C16/44
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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