| 摘要 |
PROBLEM TO BE SOLVED: To provide a door operating device capable of performing the processing for releasing the internal space of a housing container toward the internal space of a chamber smoothly and properly by moving a door, without requiring the processing for temporarily stopping the purging for the internal space of a chamber, and capable of preventing the soaring of particles incident to the releasing or occurrence of positional deviation of a transported object in the housing container.SOLUTION: A configuration including a frame 21 constituting a part of the wall surface of a transfer chamber, and having an opening 21a for releasing the transfer chamber, a door 22 capable of opening and closing the opening 21a, a mounting table 23 capable of mounting a housing container 4, a chamber 5 provided at a position facing the opening 21a on the transfer chamber side, and having the internal space 5S purged by the environmental gas, and a pressure adjustment section 6 for interconnecting the internal space 5S of the chamber 5 and the internal space 4S of the housing container 4 by using a path different from the opening 21a is employed.SELECTED DRAWING: Figure 6 |
