| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid pump capable of preventing abrasion generation, noise generation, and heat generation, stably usable for a long period, and capable of achieving a high speed rotation and a high vacuum degree.SOLUTION: A fluid pump 1 is provided with an oscillation fulcrum part 50 to be a fulcrum when an oscillation rotor 10 swings and rotates, in an arm part 10B of an oscillation rotor 10. The oscillation fulcrum part 50 has: a fixing fulcrum shaft 52 inserted into the arm part 10B so as to be always in a non-contact state, orthogonally to an oscillation rotation surface; an oscillation fulcrum shaft 54 inserted into the arm part 10B, orthogonally to the oscillation rotation surface, and rotatably fixed to the arm part 10B through a first bearing 57; and a crank 56 connecting the fixing fulcrum shaft 52 and the oscillation fulcrum shaft 54. Furthermore, there is included at least one of a fixing structure where the fixing fulcrum shaft 52 and side plates 18 and 19 are rotatably fixed through a second bearing 58, and a fixing structure where the fixing fulcrum shaft 52 and the crank 56 are rotatably fixed through a third bearing 59.SELECTED DRAWING: Figure 1 |
