SEMICONDUCTOR FLOW SENSOR

摘要

A flow sensor comprising a pair of thin film heater sensors and a thin film heater is disclosed. The flow sensor further comprises a semiconductor body with a depression therein and means connecting the heater and the sensors to the body and bridging the depression so that at least a major portion of the heater and the sensors are out of contact with the body. The sensors are disposed on opposite sides of the heater, the means connecting comprising two thin film members bridging the depression, each member comprising one sensor and a portion of the heater.